{"id":397,"date":"2026-04-15T13:55:47","date_gmt":"2026-04-15T13:55:47","guid":{"rendered":"https:\/\/citations.tools.bio-logic.fr\/?p=397"},"modified":"2026-04-15T13:55:47","modified_gmt":"2026-04-15T13:55:47","slug":"a-simple-and-low-cost-method-to-fabricate-tfts-with-poly-si-nanowire-channel","status":"publish","type":"post","link":"https:\/\/citations.tools.bio-logic.fr\/?p=397","title":{"rendered":"A simple and low-cost method to fabricate TFTs with poly-Si nanowire channel"},"content":{"rendered":"<h4>DOI:<\/h4>\n<p><a href=\"https:\/\/doi.org\/10.1109\/led.2005.853669\" target=\"_blank\" rel=\"noopener\">10.1109\/led.2005.853669<\/a><\/p>\n<h4>Authors:<\/h4>\n<p>Horng\u2010Chih Lin, Ming\u2010Hsien Lee, C.-J. Su, T.Y. Huang, Chun\u2010Chung Lee, Yuh\u2010Shyong Yang<\/p>\n<h4>Abstract:<\/h4>\n<p>A very simple and low-cost scheme is proposed for fabricating thin-film transistors with poly-Si nanowire (NW) channels. In this scheme, the poly-Si NW channel is formed by cleverly employing the poly-Si sidewall spacer technique. In addition, the poly-Si NW channel is genuinely exposed to the environment after the poly-Si sidewall spacer formation in the new scheme. This unique feature, together with its simplicity and low-cost, makes this approach very suitable for applications and manufacturing of bio-logic sensing devices. Good device performance is demonstrated in this letter.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>DOI: 10.1109\/led.2005.853669 Authors: Horng\u2010Chih Lin, Ming\u2010Hsien Lee, C.-J. Su, T.Y. Huang, Chun\u2010Chung Lee, Yuh\u2010Shyong Yang Abstract: A very simple and low-cost scheme is proposed for fabricating thin-film transistors with poly-Si nanowire (NW) channels. In this scheme, the poly-Si NW channel is formed by cleverly employing the poly-Si sidewall spacer technique. In addition, the poly-Si NW [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[9],"tags":[],"class_list":["post-397","post","type-post","status-publish","format-standard","hentry","category-its-e"],"_links":{"self":[{"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=\/wp\/v2\/posts\/397","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=397"}],"version-history":[{"count":0,"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=\/wp\/v2\/posts\/397\/revisions"}],"wp:attachment":[{"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=397"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=397"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/citations.tools.bio-logic.fr\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=397"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}